The 16th Symposium on Nano Device Technology (SNDT) was held at National Nano Device Laboratories, Hsinchu on April 29–30, 2009. There were about 340 people joining the symposium and 167 posters presented. Prof. Lih J. Chen, Vice Minister of National Science Council, Prof. Tso-Ping Ma of Yale University, the USA, and Prof. Gavin Conibeer of the University of New South Wales, Australia were invited as the keynote speakers for the event. Other distinguished speakers of both public and private sectors came from Taiwan, Japan and Singapore.